An industrial CMOS process family adapted for the fabrication of smart silicon sensors

Anisotropic Etching of Crystalline Silicon in Alkaline Solutions: I . Orientation Dependence and Behavior of Passivation Layers

H. Seidel, L. Csepregi, A. Heuberger et al. · Journal of The Electrochemical Society · 1990 · 1.6K citations

Engineering, Water Molecules, Silicon On Insulator +20

Study of electrochemical etch-stop for high-precision thickness control of silicon membranes

B. Kloeck, Scott D. Collins, N. F. de Rooij et al. · IEEE Transactions on Electron Devices · 1989 · 209 citations

Materials Science, Single-crystal Silicon Membranes, Membrane Technology +12

Integrated signal conditioning for silicon pressure sensors

John M. Borky, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 92 citations

Medical Electronics, Engineering, Wearable Technology +21

CMOS integrated silicon pressure sensor

Tohru Ishihara, Kenichiro Suzuki, S. Suwazono et al. · IEEE Journal of Solid-State Circuits · 1987 · 73 citations

Electrical Engineering, Engineering, Silicon Pressure Sensor +11

Smart sensors

J.M. Giachino · Sensors and Actuators · 1986 · 64 citations