Thermally-actuated cantilever beam for achieving large in-plane mechanical deflections

Thermally excited silicon microactuators

W. Riethmüller, W. Benecke · IEEE Transactions on Electron Devices · 1988 · 294 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Analysis of tip deflection and force of a bimetallic cantilever microactuator

Wen-Hwa Chu, Mehran Mehregany, Robert L. Mullen · Journal of Micromechanics and Microengineering · 1993 · 250 citations

Engineering, Mechanical Engineering, Applied Mechanics +13

Sensor Technology and Devices

Sensor Review · 1998 · 185 citations

Engineering, Materials Engineering, Materials Science +16

An electro-thermally and laterally driven polysilicon microactuator

Chi Shiang Pan, Wensyang Hsu · Journal of Micromechanics and Microengineering · 1997 · 152 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

The influence of gas-surface interaction on gas-film damping in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä · Sensors and Actuators A Physical · 1998 · 108 citations

Engineering, Materials Science, Mechanical Engineering +14