Torsional MEMS magnetometer operated off-resonance for in-plane magnetic field detection

A single-crystal silicon symmetrical and decoupled MEMS gyroscope on an insulating substrate

Said Emre Alper · Journal of Microelectromechanical Systems · 2005 · 151 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Resonant Magnetic Field Sensor With Frequency Output

R. Sunier, T. Vančura, Y. Li et al. · Journal of Microelectromechanical Systems · 2006 · 96 citations

Engineering, Electrical Engineering, Physics +17

A 3D micromechanical compass

Jukka Kyynäräinen, Jaakko Saarilahti, H. Kattelus et al. · Sensors and Actuators A Physical · 2007 · 87 citations

Engineering, Mechanical Engineering, Robotics Engineering +8

A Characterization of the Performance of a MEMS Gyroscope in Acoustically Harsh Environments

Robert N. Dean, Simon Castro, George T. Flowers et al. · IEEE Transactions on Industrial Electronics · 2010 · 85 citations

Engineering, Mechanical Engineering, Acoustics +16

$Z$-Axis Magnetometers for MEMS Inertial Measurement Units Using an Industrial Process

Giacomo Langfelder, Cesare Buffa, Attilio Frangi et al. · IEEE Transactions on Industrial Electronics · 2012 · 72 citations

Engineering, Electrical Engineering, Mechanical Engineering +15