Dielectric properties of sol–gel derived high-k titanium silicate thin films - Concepedia

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Dielectric properties of sol–gel derived high-k titanium silicate thin films

45

Citations

22

References

2007

Year

D.K. Sarkar, D. Brassard, My Alı El Khakani, L. Ouellet

Thin Solid Films

Materials ScienceDielectric PropertiesMaterial AnalysisEngineeringApplied PhysicsThin Film Process TechnologyThin FilmsThin Film ProcessingSol-gel SynthesisMaterial Preparation

References

	Year	Citations

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