A 1024-element bulk-micromachined thermopile infrared imaging array

CMOS analog circuit design

Integration · 1988 · 3.2K citations

Engineering, Electrical Engineering, Analog Electronics +11

Anisotropic Etching of Silicon

D. B. Lee · Journal of Applied Physics · 1969 · 307 citations

Engineering, Materials Engineering, Materials Science +15

Study of electrochemical etch-stop for high-precision thickness control of silicon membranes

B. Kloeck, Scott D. Collins, N. F. de Rooij et al. · IEEE Transactions on Electron Devices · 1989 · 209 citations

Engineering, Materials Engineering, Materials Science +17

The Controlled Etching of Silicon in Catalyzed Ethylenediamine‐Pyrocatechol‐Water Solutions

Arnold Reisman, M. Berkenblit, S. A. Chan et al. · Journal of The Electrochemical Society · 1979 · 208 citations

Natural Sciences, Materials Engineering, Materials Science +17

An integrated mass flow sensor with on-chip CMOS interface circuitry

Eui-Sung Yoon, K.D. Wise · IEEE Transactions on Electron Devices · 1992 · 130 citations

Engineering, Automotive Engineering, Electrical Engineering +17