The International Journal of Advanced Manufacturing Technology · 2010 · 17 citations · 18 references
EngineeringMechanical EngineeringMicroelectromechanical SystemsMicrofabricationVibrationMems ActuatorsMems CharacterizationMems DesignMems ModelingMems SimulationMicromachiningCantilever MechanicsCantilever Resonance Frequency ShiftMicrocantilever Design
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G. Binnig, C. F. Quate, Ch. Gerber · Physical Review Letters · 1986 · 14.4K citations · Full text
Calibration of atomic-force microscope tips
Jeffrey L. Hutter, John Bechhoefer · Review of Scientific Instruments · 1993 · 4.2K citations