Publication | Closed Access
Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography
41
Citations
12
References
2007
Year
Materials ScienceEngineeringBeam LithographyMicrofabricationNanotechnologyNanomaterialsApplied PhysicsNanolithographyNanofabricationNanosphere LithographyNanostructure SynthesisNanometrologyNanolithography Method
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