CIRP Annals · 2012 · 124 citations · 9 references
EngineeringManufacturing EngineeringMechanical EngineeringManufacturing ProcessesMicrofabricationProduction EngineeringBulk MicromachiningMems DesignMems FabricationMicrofabrication MaterialsMicrofabrication ProcessesMicromachiningMicro-assemblyMicro-scale MillingSmall-scale Manufacturing
9
State of the Art of Micromachining
T. Masuzawa · CIRP Annals · 2000 · 918 citations
Engineering, Manufacturing Engineering, Mechanical Engineering +10
Recent Advances in Mechanical Micromachining
D. A. Dornfeld, Sangkee Min, Yoshimi TAKEUCHI · CIRP Annals · 2006 · 807 citations · Full text
Engineering, Manufacturing Engineering, Mechanical Engineering +13