Microsystem technology: Between research and industrial application

High-density data storage using proximal probe techniques

H. J. Mamin, B. D. Terris, L.-S. Fan et al. · IBM Journal of Research and Development · 1995 · 128 citations

Non-volatile Memory, Optical Materials, Engineering +18

Micromachined aperture probe tip for multifunctional scanning probe microscopy

Wilfried Noell, Michaël Abraham, Karsten Mayr et al. · Applied Physics Letters · 1997 · 57 citations

Engineering, Microfabrication, Microscopy +15

The nanoworld: chances and challenges

H. Rohrer · Microelectronic Engineering · 1996 · 33 citations

Nanoscience, Nanoethics, Nanoengineering +9

Mems: What Lies Ahead?

K. Petersen · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 11 citations

Engineering, Industrial Engineering, Microelectromechanical Systems +16