Applications of SOI-based optical MEMS

Wilfried Noell, P.-A. Clerc, L. Dellmann, +7

IEEE Journal of Selected Topics in Quantum Electronics

PhotonicsElectrical EngineeringOptical MaterialsEngineeringDevice Integration +13

Near-field fluorescence imaging with 32 nm resolution based on microfabricated cantilevered probes

R Eckert, J. M. Freyland, H. Gersen, +5

Applied Physics Letters

EngineeringMicroscopyNear-field FluorescenceBiomedical EngineeringSuper-resolution Microscopy +25

Miniature lamellar grating interferometer based on silicon technology

Omar Manzardo, R. Michaely, Felix Schädelin, +4

Optics Letters

Microelectromechanical System TechnologyPhotonicsEngineeringSilicon TechnologyMicrofabrication +12

A dual-axis pointing mirror with moving-magnet actuation

Ç‪ağlar Ataman, Sébastien Lani, Wilfried Noell, +1

Journal of Micromechanics and Microengineering

Micromachined aperture probe tip for multifunctional scanning probe microscopy

Wilfried Noell, Michaël Abraham, Karsten Mayr, +5

Applied Physics Letters

EngineeringMicrofabricationMicroscopyFiber ProbesAperture Tip +13

Fabrication and characterization of linear diffusers based on concave micro lens arrays

R. Bitterli, Toralf Scharf, Hans-Peter Herzig, +8

Optics Express

Optical MaterialsEngineeringOptic DesignConcave MicroBiomedical Engineering +16

A clean wafer-scale chip-release process without dicing based on vapor phase etching

Thomas Overstolz, P.-A. Clerc, Wilfried Noell, +2

Soi WafersChip-scale PackageEngineeringHandle SideAdvanced Packaging (Semiconductors) +12

Arrays of High Tilt-Angle Micromirrors for Multiobject Spectroscopy

Severin Waldis, Frédéric Zamkotsian, P.-A. Clerc, +3

IEEE Journal of Selected Topics in Quantum Electronics

EngineeringOptic DesignMicroelectromechanical SystemsHidden SuspensionReflective Slit Masks +22

The two-dimensional array of 2048 tilting micromirrors for astronomical spectroscopy

Michael Canonica, F. Zamkotsian, Patrick Lanzoni, +2

Journal of Micromechanics and Microengineering

MEMS compatible micro-GRIN lenses for fiber to chip coupling of light

Michael J. Zickar, Wilfried Noell, C. Marxer, +1

Optics Express

Optical MaterialsEngineeringOptic DesignMultimode Optical FiberMicro-optical Component +19