Concepedia

Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling

Stefan Dauer, A. Ehlert, S. Büttgenbach

Sensors and Actuators A Physical · 1999 · 31 citations · 3 references

DOI

Concepts

References

3

Fabrication of microchannels by laser machining and anisotropic etching of silicon

M. Alavi, S. Büttgenbach, Axel Schumacher et al. · Sensors and Actuators A Physical · 1992 · 44 citations

, , +14

Fast three-dimensional laser micromachining of silicon for microsystems

Matthias Müllenborn, H. Dirac, J. W. Petersen et al. · Sensors and Actuators A Physical · 1996 · 29 citations

, , +12

On the response-time behaviour of laser micromachined NiTi shape memory actuators

Magnus Rohde, A. Schu ̈ssler · Sensors and Actuators A Physical · 1997 · 27 citations

, , +12