Nucleation control of silicon on silicon oxide for low-temperature CVD and silicon selective epitaxy

Rate equation approaches to thin film nucleation kinetics

J. A. Venables · Philosophical magazine · 1973 · 669 citations

Natural Sciences, Chemistry, Physics +16

Nucleation of metal crystals on ionic surfaces

J.L. Robins, T. N. Rhodin · Surface Science · 1964 · 116 citations

Natural Sciences, Materials Science, Physics +14

Low-temperature silicon selective deposition and epitaxy on silicon using the thermal decomposition of silane under ultraclean environment

Junichi Murota, Naoto Nakamura, Manabu Kato et al. · Applied Physics Letters · 1989 · 106 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Structure of chemically deposited polycrystalline-silicon films

T. I. Kamins, T. R. Cass · Thin Solid Films · 1973 · 91 citations

Engineering, Materials Engineering, Materials Science +12

Migration and capture processes in heterogeneous nucleation and growth

B. Lewis · Surface Science · 1970 · 72 citations

Natural Sciences, Chemistry, Physical Chemistry +10