The advent of MEMS in space

Xavier Lafontan, F. Pressecq, F. Beaudoin, S. Rigo, M. Dardalhon, Johan Le Roux, P. Schmitt, James A. Kuchenbecker, B. Baradat, Djemel Lellouchi,

Microelectronics Reliability · 2003 · 31 citations · 33 references

Concepts

References

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