Review of Scientific Instruments · 2002 · 185 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceCrystal StructureMaterials CharacterizationOpticsCrystallographyDiffractionMicrostructure AnalysisX-ray CrystallographyX-ray DiffractionX-ray OpticsHigh-resolution X-ray DiffractionIn Situ X-ray DiffractionMetallic Thin FilmsSpatial Resolution MeasurementSynchrotron X-ray CharacterizationSynchrotron X-ray DiffractionX-ray Diffraction Strain AnalysisX-ray Focusing Optics
The availability of high brilliance third generation synchrotron sources together with progress in achromatic focusing optics allows us to add submicron spatial resolution to the conventional century-old x-ray diffraction technique. The new capabilities include the possibility to map in situ, grain orientations, crystalline phase distribution, and full strain/stress tensors at a very local level, by combining white and monochromatic x-ray microbeam diffraction. This is particularly relevant for high technology industry where the understanding of material properties at a microstructural level becomes increasingly important. After describing the latest advances in the submicron x-ray diffraction techniques at the Advanced Light Source, we will give some examples of its application in material science for the measurement of strain/stress in metallic thin films and interconnects. Its use in the field of environmental science will also be discussed.
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New avenues in x-ray microbeam experiments
Christian Riekel · Reports on Progress in Physics · 2000 · 207 citations
Materials reliability in microelectronics VII
Qipeng Ma · Medical Entomology and Zoology · 1997 · 207 citations