Submicron x-ray diffraction and its applications to problems in materials and environmental science

Nobumichi Tamura, Richard Celestre, Alastair A. MacDowell, H. A. Padmore, Ralph Spolenak, B. C. Valek, Nai-Luon Chang, A. Manceau, J. R. Patel

Review of Scientific Instruments · 2002 · 185 citations · 10 references

Concepts

Abstract

The availability of high brilliance third generation synchrotron sources together with progress in achromatic focusing optics allows us to add submicron spatial resolution to the conventional century-old x-ray diffraction technique. The new capabilities include the possibility to map in situ, grain orientations, crystalline phase distribution, and full strain/stress tensors at a very local level, by combining white and monochromatic x-ray microbeam diffraction. This is particularly relevant for high technology industry where the understanding of material properties at a microstructural level becomes increasingly important. After describing the latest advances in the submicron x-ray diffraction techniques at the Advanced Light Source, we will give some examples of its application in material science for the measurement of strain/stress in metallic thin films and interconnects. Its use in the field of environmental science will also be discussed.

References

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