Concepedia

Publication | Closed Access

Microtexture and Strain in Electroplated Copper Interconnects

DOI

17

Citations

7

References

2000

Year

Ralph Spolenak, D. Barr, M. E. Gross, K. Evans‐Lutterodt, W. L. Brown, Nobumichi Tamura, Alastair A. MacDowell, Richard Celestre, H. A. Padmore, B. C. Valek,
MRS Proceedings

References

YearCitations

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