Publication | Closed Access
A vibrating micro-scale CMM probe for measuring high aspect ratio structures
82
Citations
9
References
2009
Year
VibrationsEngineeringMicroscopyMicrofabricationMeasurementMechanical EngineeringApplied PhysicsScanning Probe MicroscopyScanning Force MicroscopyEducationMicro-scale Cmm ProbeInstrumentationAcoustic MicroscopyMicro-electromechanical System
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