AFM investigation on surface damage caused by mechanical probing with small ruby spheres

Abstract

One challenge for today's coordinate metrology is fast and accurate 3D measurements on small objects. Mechanical probing is considered to be simple and accurate but limitations may arise from elastic and plastic deformations at the contact point. Understanding these limits quantitatively will help to avoid surface damage and measurement errors. Static and dynamic forces for single point probings and for scanning measurements were investigated in the present work using a metrology AFM and a micro-CMM. The obtained results were compared with theoretical predictions made by Hertz's theory. We found that the standard forces used by the METAS micro-CMM can be kept below the macroscopic damage threshold. On the other hand, plastic deformation of microscopic contact points which forms at the interface due to the surface roughness of the probe and sample is always present. Additionally, probe contamination by build-up of ductile metal on the probe surface was observed and probe wear on a hard sample was measured.