A two-chip accelerometer system for automotive applications

Precision accelerometers with μg resolution

F. Rudolf, A. Jornod, J. Bergqvist et al. · Sensors and Actuators A Physical · 1990 · 116 citations

Engineering, Mechatronics Engineering, Instrumentation +13

Capacitive silicon accelerometer with highly symmetrical design

H. Seidel, Hermann Riedel, R. Kolbeck et al. · Sensors and Actuators A Physical · 1990 · 114 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Integrated silicon microbeam PI-FET accelerometer

Pau-Ling Chen, R.S. Muller, R.D. Jolly et al. · IEEE Transactions on Electron Devices · 1982 · 99 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

A monolithic silicon accelerometer with integral air damping and overrange protection

Philip W. Barth, F. Pourahmadi, Ralph Mayer et al. · 2003 · 94 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique

S. Suzuki, Shigeki Tuchitani, Katsuhiro Satō et al. · Sensors and Actuators A Physical · 1990 · 60 citations

Engineering, Electrical Engineering, Mechanical Engineering +14