J. Bergqvist

Precision accelerometers with μg resolution

F. Rudolf, A. Jornod, J. Bergqvist et al. · Sensors and Actuators A Physical · 1990 · 116 citations

Inertial Sensors, Precision Measurement, Engineering +6

A fully-packaged electromagnetic microrelay

H.A.C. Tilmans, E. Fullin, H. Ziad et al. · 1999 · 72 citations

Engineering, Mechanical Engineering, Plastic Packages +21

Electrodeposition of 3D microstructures on silicon

J. Gobet, F. Cardot, J. Bergqvist et al. · Journal of Micromechanics and Microengineering · 1993 · 68 citations

Materials Science, Electrical Engineering, Engineering +15

Capacitive microphone with a surface micromachined backplate using electroplating technology

J. Bergqvist, J. Gobet · Journal of Microelectromechanical Systems · 1994 · 62 citations

Biomedical Sensors, Engineering, Capacitive Microphone +12

Finite-element modelling and characterization of a silicon condenser microphone with a highly perforated backplate

J. Bergqvist · Sensors and Actuators A Physical · 1993 · 56 citations

Aeroacoustics, Audio Electroacoustics, Engineering +8