Microelectronic Engineering · 2005 · 21 citations · 9 references
Materials ScienceEngineeringOptical PropertiesSpectroscopyOptical DiagnosticsApplied PhysicsLaser ApplicationsLaser-induced BreakdownLaser UltrasoundLaser-acoustic Test MethodLow-k FilmsLaser-assisted DepositionThin FilmsPulsed Laser DepositionAcoustic MicroscopyCurrent Limits
9
Low dielectric constant materials for microelectronics
Karen Maex, Mikhaı̈l R. Baklanov, Denis Shamiryan et al. · Journal of Applied Physics · 2003 · 1.6K citations