Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 23 citations · 17 references
EngineeringNanostructured PolymerPolymer NanocompositesPolymer Flow BehaviorPolymersPolymer MaterialBeam LithographyProfile ShapePolymer ProcessingPrinted ElectronicsPolymer CompositesNonlinear Profile ModelNanometrologyBiophysicsNanolithography MethodMaterials SciencePmma GratingsNanomanufacturingFabrication Technique3D PrintingPolymer MeltNanoimprint Profile ShapeMicrofabricationPolymer ScienceApplied PhysicsPolymer CharacterizationPolymer Property
The profile shape and the flow behavior of polymer nanoscale gratings made by a thermal nanoimprint process are precisely examined using visible light angular scatterometry. Nanoimprinted poly(methyl methacrylate) (PMMA) lines with 60–800nm width, 100–200nm height, and varied residual thicknesses of 70–400nm have been investigated using this optical approach, and insightful observations are made regarding residual stress buildup during thermal nanoimprint. In addition, a nonlinear profile model has been developed for scatterometry to monitor the “melting” behavior of PMMA gratings under annealing around its glass transition temperature. The polymer nanostructures were found to relax primarily at high stress regions.
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Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography
Michael D. Austin, Haixiong Ge, Wei Wu et al. · Applied Physics Letters · 2004 · 603 citations
Polymer Imprint Lithography with Molecular-Scale Resolution
Hua Feng, Yugang Sun, Anshu Gaur et al. · Nano Letters · 2004 · 407 citations