Concepedia

Optimization of Al2O3/ZrO2 nanolaminate structure for thin-film encapsulation of OLEDs

Seung‐Woo Seo, Heeyeop Chae, Sung‐Min Cho

Organic Electronics · 2012 · 112 citations · 15 references

DOI

Concepts

References

15

Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers

P. F. Carcia, R. Scott McLean, Michael H. Reilly et al. · Applied Physics Letters · 2006 · 429 citations

, , +17

Gas diffusion barriers on polymers using Al2O3 atomic layer deposition

Markus D. Groner, Steven M. George, R. Scott McLean et al. · Applied Physics Letters · 2006 · 392 citations

, , +17

Gas Diffusion Barriers on Polymers Using Multilayers Fabricated by Al<sub>2</sub>O<sub>3</sub> and Rapid SiO<sub>2</sub> Atomic Layer Deposition

Arrelaine A. Dameron, Stephen D. Davidson, B. B. Burton et al. · The Journal of Physical Chemistry C · 2008 · 374 citations

, , +17

Surface morphology and crystallinity control in the atomic layer deposition (ALD) of hafnium and zirconium oxide thin films

Dennis M. Hausmann, Roy G. Gordon · Journal of Crystal Growth · 2003 · 311 citations

, , +17

Al<sub>2</sub>O<sub>3</sub>/ZrO<sub>2</sub> Nanolaminates as Ultrahigh Gas‐Diffusion Barriers—A Strategy for Reliable Encapsulation of Organic Electronics

Jens Meyer, Patrick Görrn, Franz Bertram et al. · Advanced Materials · 2009 · 306 citations

, , +14