Thin-film Encapsulation
Thin-Film Encapsulation is a wafer-level packaging technique in BioMEMS that involves the deposition of thin, multilayered films to hermetically seal and protect microdevices at the substrate surface.
219
Publications
8.7K
Citations
1K
Authors
276
Institutions
Publications per year
2017–2026
66
219
Jens Meyer, Patrick Görrn, Franz Bertram et al. · Advanced Materials · 2009 · 306 citations
Thin-film encapsulation of organic light-emitting devices
Amalkumar P. Ghosh, L. J. Gerenser, C. M. Jarman et al. · Applied Physics Letters · 2005 · 258 citations
Natural Sciences, Materials Engineering, Materials Science +17
Ultrathin Film Encapsulation of an OLED by ALD
Sang‐Hee Ko Park, Ji-Young Oh, Chi‐Sun Hwang et al. · Electrochemical and Solid-State Letters · 2005 · 152 citations
Natural Sciences, Materials Engineering, Materials Science +17
1–5 of 219
1K
Korea Advanced Institute of Science and Technology, South Korea
8 publications · 661 citations
8
h-index
8
h-index
7
h-index
Korea Advanced Institute of Science and Technology, South Korea
7 publications · 194 citations
7
h-index
5
h-index
1–5 of 1K
276
Korea Advanced Institute of Science and Technology
Daejeon, South Korea
16 h-index
86 publications
4.8K citations
Stanford University
Stanford, United States
10 h-index
51 publications
1.7K citations

Hanyang University
Seoul, South Korea
10 h-index
46 publications
2.1K citations
Jilin University
Changchun, China
9 h-index
53 publications
4.1K citations
State Key Laboratory on Integrated Optoelectronics
Beijing, China
8 h-index
44 publications
3.4K citations
Electronics and Telecommunications Research Institute
Daejeon, South Korea
7 h-index
33 publications
2.1K citations
Samsung (South Korea)
Seoul, South Korea
6 h-index
28 publications
913 citations
IMEC
Leuven, Belgium
6 h-index
30 publications
746 citations
1–8 of 276
15 publications · 741 citations
14
h-index
10 publications · 607 citations
10
h-index
10 publications · 236 citations
10
h-index
9 publications · 328 citations
9
h-index
9 publications · 261 citations
9
h-index
1–5