Ultrathin Film Encapsulation of an OLED by ALD

Abstract

Fabrication of barrier layers on a PES film and an organic light emitting diode (OLED) based on a glass substrate by atomic layer deposition (ALD) have been carried out. Deposition of 30 nm of film on both sides of PES film at 90°C gave film MOCON value of The passivation performance of the double layer consisting of deposited by plasma-enhanced chemical vapor deposition and by ALD on the OLED has been investigated using the OLED based on a glass substrate. Preliminary life time of two pairs of double layer coated OLED to 65% of initial luminance was 600 h at the initial luminance of © 2005 The Electrochemical Society. All rights reserved.