Ultrathin Film Encapsulation of an OLED by ALD

Sang‐Hee Ko Park, Ji-Young Oh, Chi‐Sun Hwang, Jeong-Ik Lee, Yong Suk Yang, Hye Yong Chu

Electrochemical and Solid-State Letters · 2005 · 152 citations · 6 references

Concepts

Abstract

Fabrication of barrier layers on a PES film and an organic light emitting diode (OLED) based on a glass substrate by atomic layer deposition (ALD) have been carried out. Deposition of 30 nm of film on both sides of PES film at 90°C gave film MOCON value of The passivation performance of the double layer consisting of deposited by plasma-enhanced chemical vapor deposition and by ALD on the OLED has been investigated using the OLED based on a glass substrate. Preliminary life time of two pairs of double layer coated OLED to 65% of initial luminance was 600 h at the initial luminance of © 2005 The Electrochemical Society. All rights reserved.

References

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