The properties of plasma-enhanced atomic layer deposition (ALD) ZnO thin films and comparison with thermal ALD

Repeated temperature modulation epitaxy for p-type doping and light-emitting diode based on ZnO

Atsushi Tsukazaki, Akira Ohtomo, Takeyoshi Onuma et al. · Nature Materials · 2004 · 2.1K citations

Engineering, Materials Engineering, Materials Science +16

Transparent Conducting Oxides for Photovoltaics

Elvira Fortunato, David S. Ginley, Hideo Hosono et al. · MRS Bulletin · 2007 · 901 citations

Natural Sciences, Materials Engineering, Materials Science +12

On the origin of high-temperature ferromagnetism in the low-temperature-processed Mn–Zn–O system

Darshan C. Kundaliya, Satishchandra Ogale, S. E. Lofland et al. · Nature Materials · 2004 · 470 citations

Natural Sciences, Materials Engineering, Materials Science +12

ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor

Seungmin Lim, Soon‐Ju Kwon, Hyeongjun Kim · Thin Solid Films · 2007 · 152 citations

Natural Sciences, Materials Engineering, Materials Science +17

Comparison between ZnO films grown by atomic layer deposition using H2O or O3 as oxidant

Seong Keun Kim, Cheol Seong Hwang, Sang‐Hee Ko Park et al. · Thin Solid Films · 2004 · 150 citations

Natural Sciences, Materials Engineering, Materials Science +14