Concepedia
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1999 · 22 citations · 17 references
Open access
Materials ScienceAnomalous Surface DamageIon ImplantationEngineeringPhysicsCrystalline DefectsSurface ScienceApplied PhysicsSilicon On InsulatorIon EmissionComparative StudySilicon Debugging
17
Computer methods for analysis and simulation of RBS and ERDA spectra
E. Kótai · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1994 · 333 citations
Computer Methods, Physics, Erda Spectra +9
Dominant Influence of Beam-Induced Interface Rearrangement on Solid-Phase Epitaxial Crystallization of Amorphous Silicon
J. S. Williams, R. G. Elliman, W. L. Brown et al. · Physical Review Letters · 1985 · 209 citations
Materials Science, Ion Implantation, Epitaxial Growth +15
Ion-beam-induced epitaxial crystallization and amorphization in silicon
F. Priolo, E. Rimini · Materials Science Reports · 1990 · 197 citations
Ion-beam-induced Epitaxial Crystallization, Ion Implantation, Applied Physics +2
Proportionality between ion-beam-induced epitaxial regrowth in silicon and nuclear energy deposition
Jan Linnros, G. Holmén, B. G. Svensson · Physical review. B, Condensed matter · 1985 · 123 citations
Point Defects, Engineering, Ion Beam Instrumentation +16
Spectroscopic ellipsometry: A new tool for nondestructive depth profiling and characterization of interfaces
P. J. McMarr, K. Vedam, J. Narayan · Journal of Applied Physics · 1986 · 113 citations
Engineering, New Tool, Optical Testing +25