A three-axis SOI accelerometer sensing with both in-plane and vertical comb electrodes

Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments

Tim Brosnihan, J.M. Bustillo, Albert P. Pisano et al. · 2002 · 77 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

A high-performance accelerometer with a fifth-order sigma–delta modulator

Yufeng Dong, Michaël Kraft, C. Gollasch et al. · Journal of Micromechanics and Microengineering · 2005 · 73 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Three-axis SOI capacitive accelerometer with PLL C–V converter

Yoshinori Matsumoto, M. Nishimura, Miho Matsuura et al. · Sensors and Actuators A Physical · 1999 · 61 citations

Engineering, Electrical Engineering, Mechatronics Engineering +11

A z-axis differential capacitive SOI accelerometer with vertical comb electrodes

Toshiyuki Tsuchiya, Hirofumi Funabashi · Sensors and Actuators A Physical · 2004 · 60 citations

Engineering, Electrical Engineering, Mechanical Engineering +11

New capacitive low-<i>g</i>triaxial accelerometer with low cross-axis sensitivity

Yu‐Wen Hsu, Jen-Yi Chen, Hsin-Tang Chien et al. · Journal of Micromechanics and Microengineering · 2010 · 40 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17