Youhe Liu

Statistics

Publications

Citations

234

H-Index

Active since

2009

Affiliations

Agency for Science, Technology and Research(Current)

Institute of Microelectronics

Singapore Science Park

Youhe Liu is an author at Agency for Science, Technology and Research specializing in engineering, electrical engineering, and microelectromechanical systems.

Publications per year

2009–2011

Publications

Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators

Jin Xie, Chengkuo Lee, Ming-Fang Wang et al. · Journal of Micromechanics and Microengineering · 2009 · 108 citations

Engineering, Materials Engineering, Materials Science +17

Influence of Bosch Etch Process on Electrical Isolation of TSV Structures

N. Ranganathan, Da Yong Lee, Youhe Liu et al. · IEEE Transactions on Components Packaging and Manufacturing Technology · 2011 · 97 citations

Engineering, Electrical Engineering, Materials Science +17

A three-axis SOI accelerometer sensing with both in-plane and vertical comb electrodes

Jin Xie, Rahul Agarwal, Youhe Liu et al. · Microsystem Technologies · 2011 · 17 citations

Engineering, Electrical Engineering, Mechatronics Engineering +10

Compact electrode design for an in-plane accelerometer on SOI with refilled isolation trench

Jin Xie, Rahul Agarwal, Youhe Liu et al. · Journal of Micromechanics and Microengineering · 2011 · 12 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

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