Concepedia
Surface and Coatings Technology · 2004 · 10 citations · 11 references
MagnetismElectrical EngineeringEngineeringApplied Plasma PhysicInternal LinearComputational ElectromagneticsPlasma SystemPlasma EtchingMultipolar Magnetic FieldsPlasma Application
11
Review of inductively coupled plasmas for plasma processing
Jeffrey Hopwood · Plasma Sources Science and Technology · 1992 · 666 citations
Electrical Engineering, Engineering, Physics +11
Langmuir probe measurements of a radio frequency induction plasma
Jeffrey Hopwood, C. R. Guarnieri, S. J. Whitehair et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 294 citations
Engineering, Plasma Science, Plasma Physics +17
Design of a magnetic-pole enhanced inductively coupled plasma source
T. Meziani, Pascal Colpo, François Rossi · Plasma Sources Science and Technology · 2001 · 87 citations
Magnetism, Electrical Engineering, Engineering +8
Glow discharge processing in the liquid crystal display industry
Jacques Schmitt, M. Elyaakoubi, L. Sansonnens · Plasma Sources Science and Technology · 2002 · 77 citations · Full text
A traveling wave-driven, inductively coupled large area plasma source
Yaoxi Wu, M. A. Lieberman · Applied Physics Letters · 1998 · 58 citations
Electrical Engineering, Plasma Electronics, Space Plasma Physics +14