Applied Surface Science · 1993 · 17 citations · 5 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsSurface ScienceEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor Thin FilmsEpitaxial Film GrowthEpitaxial MaterialsReactive Deposition
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Epitaxial growth of CrSi2 on (111)Si
F. Y. Shiau, Hao Cheng, Lu-Hsing Chen · Applied Physics Letters · 1984 · 52 citations