Design optimization for cantilever-type accelerometers

A graphical representation of the piezoresistance coefficients in silicon

Yozo Kanda · IEEE Transactions on Electron Devices · 1982 · 897 citations

Natural Sciences, Materials Engineering, Materials Science +10

A batch-fabricated silicon accelerometer

L. M. Roylance, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 507 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Integrated silicon microbeam PI-FET accelerometer

Pau-Ling Chen, R.S. Muller, R.D. Jolly et al. · IEEE Transactions on Electron Devices · 1982 · 99 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Micromechanical accelerometer integrated with MOS detection circuitry

K. Petersen, A. Shartel, N.F. Raley · IEEE Transactions on Electron Devices · 1982 · 95 citations

Engineering, Electrical Engineering, Microelectromechanical Systems +16

A micromechanical capacitive accelerometer with a two-point inertial-mass suspension

F. Rudolf · Sensors and Actuators · 1983 · 73 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +14