Concepedia

Quantitative SIMS analysis of SiGe composition with low energy O2+ beams

Z. X. Jiang, K. Kim, J. Lerma, Alexander D. Corbett, D. Sieloff, M. Kottke, R. B. Gregory, S. N. Schauer

Applied Surface Science · 2006 · 28 citations · 2 references

DOI

Concepts

References

2

Charge compensation using optical conductivity enhancement and simple analytical protocols for SIMS of resistive Si1−xGex alloy layers

M. G. Dowsett, R. J. H. Morris, Pei-Fen Chou et al. · Applied Surface Science · 2002 · 16 citations

, , +17

Impact of the Ge concentration on the Ge-ionisation probability and the matrix sputter yield for a SiGe matrix under oxygen irradiation

Cedric Huyghebaert, T. Conard, Bert Brijs et al. · Applied Surface Science · 2004 · 12 citations

, , +7