Pei-Fen Chou

Publications

Citations

H-Index

2001

Active since

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

Taiwan Semiconductor Manufacturing Company (United States)

National Yang Ming Chiao Tung University

Pei-Fen Chou is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in applied physics, engineering, and electrical insulation.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrical InsulationElectrical EngineeringMicroelectronicsThin FilmsOptoelectronicsSurface ScienceElectronic Materials

Publications per year

2001–2002

Publications

Physical and Electrical Characteristics of Methylsilane- and Trimethylsilane-Doped Low Dielectric Constant Chemical Vapor Deposited Oxides

Zhen-Cheng Wu, Zhi-Wen Shiung, Chiu-Chih Chiang et al. · Journal of The Electrochemical Society · 2001 · 23 citations

Materials Science, Electrical Characteristics, Electrical Engineering +14

Physical and Electrical Characteristics of F- and C-Doped Low Dielectric Constant Chemical Vapor Deposited Oxides

Zhen-Cheng Wu, Zhi-Wen Shiung, Chiu-Chih Chiang et al. · Journal of The Electrochemical Society · 2001 · 23 citations

Engineering, Glass Material, Electrical Characteristics +16

Charge compensation using optical conductivity enhancement and simple analytical protocols for SIMS of resistive Si1−xGex alloy layers

M. G. Dowsett, R. J. H. Morris, Pei-Fen Chou et al. · Applied Surface Science · 2002 · 16 citations

Materials Science, Electrical Engineering, Semiconductor Device +10

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