Concepedia

Spatial atmospheric atomic layer deposition: a new laboratory and industrial tool for low-cost photovoltaics

David Muñoz‐Rojas, Judith L. MacManus‐Driscoll

Materials Horizons · 2014 · 159 citations · 42 references

DOIFull text

Open access

Concepts

Abstract

Fast air printing of functional oxide films: spatial atomic layer deposition, a new technique with a high potential in the field of low cost photovoltaics.

References

42

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Riikka L. Puurunen · Journal of Applied Physics · 2005 · 2.6K citations

, , +17

Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends

Ville Miikkulainen, Markku Leskelä, Mikko Ritala et al. · Journal of Applied Physics · 2013 · 1.4K citations

, , +17

Atomic layer deposition (ALD): from precursors to thin film structures

Markku Leskelä, Mikko Ritala · Thin Solid Films · 2002 · 1.3K citations

, , +14

Atomic Layer Deposition Chemistry: Recent Developments and Future Challenges

Markku Leskelä, Mikko Ritala · Angewandte Chemie International Edition · 2003 · 1.1K citations · Full text

, , +17

Synthesis and Surface Engineering of Complex Nanostructures by Atomic Layer Deposition

Mato Knez, Kornelius Nielsch, Lauri Niinistö · Advanced Materials · 2007 · 877 citations · Full text

, , +16