Journal of Micromechanics and Microengineering · 2002 · 60 citations · 15 references
EngineeringChemical EngineeringMechanical EngineeringComputational Fluid DynamicsFluid DynamicsMicrofabricationElectrokinetic PhenomenaMicrofluidic Device FabricationMicrofluidic DevicesMicrofluidic SystemsMicrofluidic TransportMicrofluidicsComposition ModulationElectrokinetic FlowElectrokinetic Flow ControlFlow Rate DependenceMicrochannel FlowMicrochannel HydrodynamicsMicrofluidic FlowReplica Molding
A numerical and experimental study of the injection into a microchannel of a fluid with a spatially modulated composition is presented. The investigation employs test structures constructed in polydimethylsiloxane by standard replica molding. Fluid-flow simulations are compared to flow results obtained by fluorescence microscopy experiments. Results show that for a given channel dimension, the desired modulation of the solution composition is only possible below a threshold frequency. The value of the threshold frequency is dependent on channel size as well as flow rate. Experimental results are in accord with numerical simulations and theoretical considerations.
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SU-8: a low-cost negative resist for MEMS
H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 972 citations · Full text