IBM Journal of Research and Development · 2000 · 147 citations · 19 references
EngineeringComputer EngineeringElectrical EngineeringComputer ArchitectureElectronic MaterialsSemiconductor DevicesIntegrated Circuit DesignIntegrated Circuit DevicesInterconnect ArchitectureInterconnect DesignInterconnect TechnologyOptical InterconnectsCopper MetallizationDual Damascene ProcessHierarchical InterconnectsInsulating MaterialsLow-dielectric-constant MaterialsMemory ArraysMemory InterconnectsMetallization
Advances in interconnection technology—such as copper metallization, dual‑damascene processing, hierarchical wiring, and low‑k dielectrics—are driving continued improvements in integrated circuit performance, though some experts predict only a few more generations of benefit. The paper reviews current trends and likely future paths for interconnection technology to assess its long‑term impact. The authors develop a simple model to estimate future wiring needs and evaluate the benefits of additional material and architectural innovations. The model predicts that, if current trends persist, wiring will not limit performance for at least a decade, and optical interconnections offer little advantage compared to the rapid advancement of conventional wiring.
Continuing advances in interconnection technology are seen as essential to continued improvements in integrated circuit performance. The recent introduction of copper metallization, dual-damascene processing, and fully articulated hierarchical wiring structures, along with the imminent introduction of low-dielectric-constant insulating materials, indicates an accelerating pace of innovation. Nevertheless, some authors have argued that such innovations will sustain chip-level performance improvements for only another generation or two. In light of this pessimism, current trends and probable paths in the future evolution of interconnection technology are reviewed. A simple model is developed and used to estimate future wiring requirements and to examine the value of further innovations in materials and architecture. As long as current trends continue, with memory arrays filling an increasing fraction of the total area of high-performance microprocessor chips, wiring need not be a performance limiter for at least another decade. Alternative approaches, such as optical interconnections on chip, have little to offer while the incremental elaboration of the traditional wiring systems is still rapidly advancing.
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Engineering, Computer Engineering, Electrical Engineering +17