J. Heidenreich

Publications

2.4K

Citations

H-Index

1983

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

IBM (United States)

Université de Montréal

University of California San Diego

Infineon Technologies (United States)

J. Heidenreich is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, electrical engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringMaterial ScienceChemistryPhysicsPlasma TheoryMicroelectronicsElectrical InsulationPlasma Confinement

Publications per year

1983–2002

Publications

The Mass-Independent Fractionation of Oxygen: A Novel Isotope Effect and Its Possible Cosmochemical Implications

M. H. Thiemens, J. Heidenreich · Science · 1983 · 636 citations

Isotope Analysis, Organic Geochemistry, Cosmic Abundance +14

Full copper wiring in a sub-0.25 μm CMOS ULSI technology

D. Edelstein, J. Heidenreich, R. Goldblatt et al. · 2002 · 350 citations

3D Ic Architecture, Electrical Engineering, Cu Wiring +8

The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges

P. J. Hargis, K. E. Greenberg, Paul Miller et al. · Review of Scientific Instruments · 1994 · 330 citations · Full text

Electrical Engineering, Plasma Electronics, Engineering +11

Particle trapping phenomena in radio frequency plasmas

Gary S. Selwyn, J. Heidenreich, Kurt Haller · Applied Physics Letters · 1990 · 279 citations

Plasma Electronics, Engineering, Physics +15

A non-mass-dependent oxygen isotope effect in the production of ozone from molecular oxygen: The role of molecular symmetry in isotope chemistry

J. Heidenreich, M. H. Thiemens · The Journal of Chemical Physics · 1986 · 176 citations

Oxygen Isotope Effect, Environmental Chemistry, Engineering +15

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