The study of porous silicon powders by capillary condensation

Abstract

Gas adsorption and capillary condensation phenomena were studied in powders of porous silicon with different doping levels of the silicon substrate of n-type conductivity in various conditions. Specific surface area and the rated pore size distribution were determined for porous silicon with complex texture by the capillary condensation method. It is shown that the samples obtained in silicon with a higher doping level have a higher value of specific surface area.