Concepedia

Revised fabrication process for micro-fluxgate-magnetometers: Usage of electrodepositable photoresist

Maren Ramona Kirchhoff, Jens Güttler, A. Waldschik, M. Feldmann, S. Büttgenbach

Microelectronic Engineering · 2007 · 14 citations · 3 references

DOI

Concepts

References

3

The fluxgate magnetometer

F. Primdahl · Journal of Physics E Scientific Instruments · 1979 · 496 citations

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Advances in fluxgate sensors

Pavel Ripka · Sensors and Actuators A Physical · 2003 · 344 citations

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Technology and application of electro-depositable photo resists to create uniform coatings needed for complex 3D micro actuators and sensors

M. Feldmann, A. Waldschik, S. Büttgenbach · Microsystem Technologies · 2006 · 14 citations

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