Concepedia

Dielectric and leakage current characteristics of Ba(Ti1-xZrx)O3 thin films deposited by rf magnetron sputtering

Tai‐Bor Wu, Chii-Ming Wu, Meiling Chen

Thin Solid Films · 1998 · 25 citations · 12 references

DOI

Concepts

References

12

Investigation of Pt/Ti bilayer metallization on silicon for ferroelectric thin film integration

K. Sreenivas, Ian M. Reaney, Thomas Maeder et al. · Journal of Applied Physics · 1994 · 282 citations · Full text

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High-Permittivity Perovskite Thin Films for Dynamic Random-Access Memories

A. I. Kingon, S. K. Streiffer, C. Basceri et al. · MRS Bulletin · 1996 · 228 citations

, , +14

Ferroelectric properties in epitaxially grown Ba<i>x</i>Sr1−<i>x</i>TiO3 thin films

Kazuhide Abe, Shuichi Komatsu · Journal of Applied Physics · 1995 · 184 citations

, , +17

Effects of anneal ambients and Pt thickness on Pt/Ti and Pt/Ti/TiN interfacial reactions

J. O. Olowolafe, Robert E. Jones, A. C. Campbell et al. · Journal of Applied Physics · 1993 · 141 citations

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Step Coverage and Electrical Properties of (Ba, Sr)TiO<sub>3</sub> Films Prepared by Liquid Source Chemical Vapor Deposition Using TiO(DPM)<sub>2</sub>

Takaaki Kawahara, Mikio Yamamuka, Tetsuro Makita et al. · Japanese Journal of Applied Physics · 1994 · 100 citations

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