Deep X-ray mask with integrated electro-thermal micro xy-stage for 3D fabrication

Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices

Long Que, Jaesung Park, Yogesh B. Gianchandani · Journal of Microelectromechanical Systems · 2001 · 346 citations

Engineering, Mechanical Engineering, Electrothermal Microactuators +16

High-aspect-ratio micromachining via deep X-ray lithography

H. Guckel · Proceedings of the IEEE · 1998 · 140 citations

Engineering, Target Fabrication, Mechanical Engineering +19

Recent developments in deep x-ray lithography

W. Ehrfeld, A. Schmidt · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 94 citations

Short Wavelength Optic, Optical Materials, Engineering +21

Direct writing for three-dimensional microfabrication using synchrotron radiation etching

Takanori Katoh, N. Nishi, Masafumi Fukagawa et al. · Sensors and Actuators A Physical · 2001 · 60 citations

Materials Science, Engineering, Microfabrication +4

X-ray lathe: An X-ray lithographic exposure tool for nonplanar objects

Alan Feinerman, R.E. Lajos, Victor White et al. · Journal of Microelectromechanical Systems · 1996 · 40 citations

X-ray Spectroscopy, Engineering, Electron-beam Lithography +19