A. Schmidt

Recent developments in deep x-ray lithography

W. Ehrfeld, A. Schmidt · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 94 citations

Short Wavelength Optic, Optical Materials, Engineering +21

The High Energy Density Scientific Instrument at the European XFEL

U. Zastrau, Karen Appel, Carsten Baehtz et al. · Journal of Synchrotron Radiation · 2021 · 90 citations · Full text

Design, fabrication, and characterization of a planar, silicon-based, monolithically integrated micro laminar flow fuel cell with a bridge-shaped microchannel cross-section

Pedro O. Lopez-Montesinos, N. Yossakda, A. Schmidt et al. · Journal of Power Sources · 2011 · 80 citations

Bridge-shaped Microchannel Cross-section, Engineering, Microfabrication +5

Materials Imaging and Dynamics (MID) instrument at the European X-ray Free-Electron Laser Facility

Anders Madsen, Jörg Hallmann, G. Ansaldi et al. · Journal of Synchrotron Radiation · 2021 · 68 citations · Full text

X-ray Spectroscopy, Engineering, Microscopy +17

Calculation and experimental determination of the structure transfer accuracy in deep x-ray lithography

Gregor Feiertag, W. Ehrfeld, H. Lehr et al. · Journal of Micromechanics and Microengineering · 1997 · 52 citations

Engineering, Electron-beam Lithography, Microscopy +17