Concepedia

Author

Gregor Feiertag

Carl Zeiss (Germany)ORCID

Also Known As

G Feiertag, G. Feiertag, Gregor Feiertag

51

Publications

475

Citations

10

H-Index

44

Concepts

All Affiliations

Carl Zeiss (Germany)Fraunhofer Institute for Microengineering and MicrosystemsMunich University of Applied Sciences
GF

About

Gregor Feiertag is an author at Carl Zeiss (Germany) specializing in engineering, microfabrication, and materials science.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

9

9

341

2

Applied Physics

5

5

242

3

Education

1

1

17

4

Computer Engineering

1

1

38

5

Electrical Engineering

1

1

38

Gregor Feiertag

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10

Publications

353

Citations

10

H-Index

YearCitations

Fabrication of photonic crystals by deep x-ray lithography

Gregor Feiertag, W. Ehrfeld, H. Freimuth,

Applied Physics Letters

1997

138

Calculation and experimental determination of the structure transfer accuracy in deep x-ray lithography

Gregor Feiertag, W. Ehrfeld, H. Lehr,

Journal of Micromechanics and Microengineering

1997

52

Recent advances in SAW packaging

P. Selmeier, R. Grünwald, Andreas Przadka,

2002

38

MEMS microphones with narrow sensitivity distribution

S. Walser, C. Siegel, Matthias Winter,

Sensors and Actuators A Physical

2016

29

Investigation of the adhesive strength of PMMA structures on substrates obtained by deep X-ray lithography

A. Schmidt, Andrew A. Clifton, W. Ehrfeld,

Microelectronic Engineering

1996

24

Accuracy of structure transfer in deep X-ray lithography

Gregor Feiertag, W. Ehrfeld, H. Lehr,

Microelectronic Engineering

1997

18

Influence of a chip scale package on the frequency response of a MEMS microphone

Matthias Winter, Gregor Feiertag, Anton Leidl,

Microsystem Technologies

2009

17

Thermoelastic deformations of masks for deep X-ray lithography

Gregor Feiertag, Martin A. Schmidt, A. Schmidt

Microelectronic Engineering

1995

15

Temperature characterization of flip-chip packaged piezoresistive barometric pressure sensors

T. Waber, W. Pahl, Matthias Schmidt,

Microsystem Technologies

2014

12

Flip-chip packaging of piezoresistive barometric pressure sensors

T. Waber, W. Pahl, Matthias Schmidt,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2013

10

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