Concepedia

Gregor Feiertag

GF

10

Publications

353

Citations

10

H-Index

1995

Active since

Affiliations

Carl Zeiss (Germany)(Current)

Fraunhofer Institute for Microengineering and Microsystems

Munich University of Applied Sciences

Gregor Feiertag is an author at Carl Zeiss (Germany) specializing in engineering, microfabrication, and materials science.

Top concepts

EngineeringMaterial ScienceMicrofabricationApplied PhysicsMicroelectronicsElectronic PackagingMicrostructureInstrumentationNoisePhysics

Publications per year

1995–2016

10

Publications

10

Fabrication of photonic crystals by deep x-ray lithography

Gregor Feiertag, W. Ehrfeld, H. Freimuth et al. · Applied Physics Letters · 1997 · 138 citations

Optical Materials, Engineering, Laser Applications +23

Calculation and experimental determination of the structure transfer accuracy in deep x-ray lithography

Gregor Feiertag, W. Ehrfeld, H. Lehr et al. · Journal of Micromechanics and Microengineering · 1997 · 52 citations

Engineering, Electron-beam Lithography, Microscopy +17

Recent advances in SAW packaging

P. Selmeier, R. Grünwald, Andreas Przadka et al. · 2002 · 38 citations

Engineering, Specific Cssp Technologies, Electromagnetic Compatibility +19

MEMS microphones with narrow sensitivity distribution

S. Walser, C. Siegel, Matthias Winter et al. · Sensors and Actuators A Physical · 2016 · 29 citations

Acoustic Camera, Engineering, Mems Microphones +4

Investigation of the adhesive strength of PMMA structures on substrates obtained by deep X-ray lithography

A. Schmidt, Andrew A. Clifton, W. Ehrfeld et al. · Microelectronic Engineering · 1996 · 24 citations

Materials Science, Engineering, Electron-beam Lithography +11

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