Investigation of the adhesive strength of PMMA structures on substrates obtained by deep X-ray lithography - Concepedia

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Investigation of the adhesive strength of PMMA structures on substrates obtained by deep X-ray lithography

24

Citations

2

References

1996

Year

A. Schmidt, Andrew A. Clifton, W. Ehrfeld, Gregor Feiertag, H. Lehr, Martin A. Schmidt

Microelectronic Engineering

Materials ScienceEngineeringElectron-beam LithographyBeam LithographyMicrofabricationAdhesive StrengthAdhesive MaterialMechanical EngineeringApplied PhysicsDeep X-ray LithographyElectronic PackagingPmma StructuresNanolithography MethodStructural Adhesive

References

	Year	Citations

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