Amorphous InGaZnO thin film transistors with SiO2/HfO2 double-layer gate dielectric fabricated at low temperature

Jihong Kim, Jae-Won Kim, Ji-Hyung Roh, Kang-Min Do, Ju-Hong Shin, Sang-Mo Koo, Byung‐Moo Moon

Materials Research Bulletin · 2012 · 11 citations · 11 references

Concepts

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