An ultra-thin interposer utilizing 3D TSV technology

Abstract

To achieve ultra small form factor package solution, an ultra-thin (50μm) Si interposer utilizing through-silicon-via (TSV) technology has been developed. Challenges associated with handling thin wafer and maintaining package co-planarity have been overcome to stack thin dies (200 μm) on ultra-thin interposer. Improved electrical performance and the advantages of this innovative thin interposer are highlighted in this paper. Warpage behavior is investigated with simulation and experiments to ensure reliability and robustness of the Si stack. Reduction in package thickness is realized to achieve high functionality, small form factor, better electrical performance and robust reliability by stacking thin dies on ultra-thin interposer.