Structural, mechanical and tribological investigations of pulsed laser deposited titanium nitride coatings

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Reactive-sputter-deposited TiN films on glass substrates

Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations

Natural Sciences, Materials Engineering, Materials Science +14

An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering

H. Windischmann · Journal of Applied Physics · 1987 · 401 citations

Natural Sciences, Materials Engineering, Materials Science +16

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

I. Petrov, Lars Hultman, Ulf Helmersson et al. · Thin Solid Films · 1989 · 327 citations

Natural Sciences, Materials Engineering, Materials Science +16

Low energy ion assist during deposition — an effective tool for controlling thin film microstructure

Wolfgang Ensinger · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1997 · 185 citations

Natural Sciences, Materials Engineering, Materials Science +17