Miniaturised optical encoder for ultra precision metrology systems

Challenges in interconnection and packaging of microelectromechanical systems (MEMS)

R. Ramesham, Reza Ghaffarian · 2002 · 84 citations

Engineering, Electrical Engineering, Materials Engineering +16

A compact optical encoder with micromachined photodetector

Kazuhiro Hane, Tomoyuki Endo, Y. Ito et al. · Journal of Optics A Pure and Applied Optics · 2001 · 32 citations

Engineering, Electrical Engineering, Materials Science +14

Optical IMEMS/sup /spl reg//-a fabrication process for MEMS optical switches with integrated on-chip electronics

Tim Brosnihan, Stephanie Brown, A. Brogan et al. · 2004 · 31 citations

Engineering, Electrical Engineering, Actuators +16

Integration of grating-image-type encoder using Si micromachining

Kazuhiro Hane, Tomoyuki Endo, Masahiro Ishimori et al. · Sensors and Actuators A Physical · 2002 · 30 citations

Engineering, Electrical Engineering, Microfabrication +10