Comparison of Solid-State Microwave Annealing with Conventional Furnace Annealing of Ion-Implanted SiC

Siddarth Sundaresan, Mulpuri V. Rao, Yong-Lai Tian, John A. Schreifels, M. C. Wood, Kenneth A. Jones, Albert V. Davydov

Journal of Electronic Materials · 2007 · 32 citations · 24 references

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