Preliminary evaluation of the influence of the temperature on the performance of a piezoresistive pressure sensor based on a-SiC film

Silicon carbide as a new MEMS technology

P.M. Sarro · Sensors and Actuators A Physical · 2000 · 414 citations

Materials Science, Engineering, Microfabrication +6

SiC MEMS: opportunities and challenges for applications in harsh environments

Mehran Mehregany, Christian A. Zorman · Thin Solid Films · 1999 · 317 citations

Electrical Engineering, Engineering, Microfabrication +9

Effect of nitrogen

Dm Knoll · 1987 · 206 citations

Biogeochemistry, Ammonia, Nutrient Cycle

A SiC MEMS Resonant Strain Sensor for Harsh Environment Applications

Robert G. Azevedo, Debbie G. Jones, Anand V. Jog et al. · IEEE Sensors Journal · 2007 · 180 citations

Harsh Environment Applications, Electrical Engineering, Engineering +13

Fabrication and characterization

Samuel P. Kounaves, Wen Deng · 1991 · 148 citations

Engineering, Electrode-electrolyte Interface, Fabrication Techniques +16